Verification of momentum transfer as the dominant densifying mechanism in ion-assisted deposition
- 15 September 1988
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 27 (18) , 3779-3781
- https://doi.org/10.1364/ao.27.003779
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 7 references indexed in Scilit:
- Effect of oxygen incorporation on the structure of ion-beam-assisted LaF_3 thin filmsApplied Optics, 1988
- Ion-assisted deposition of lanthanum fluoride thin filmsApplied Optics, 1987
- Structure-related optical properties of thin filmsJournal of Vacuum Science & Technology A, 1986
- Model for ion-assisted thin-film densificationJournal of Applied Physics, 1986
- Monte Carlo calculation for structural modifications in ion-assisted thin film deposition due to thermal spikesJournal of Vacuum Science & Technology A, 1986
- A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin filmJournal of Physics E: Scientific Instruments, 1976
- Porosity of MgF2 Films—Evaluation Based on Changes in Refractive Index Due to Adsorption of VaporsJournal of Vacuum Science and Technology, 1969