A novel capacitive-type humidity sensor using CMOS fabrication technology

This publication has 13 references indexed in Scilit:

• Fabrication of single crystal Si cantilevers using a dry release process and application in a capacitive-type humidity sensor
  Microelectronic Engineering, 2002
• Recent achievements in miniaturised humidity sensors—a review of transduction techniques
  Sensors and Actuators A: Physical, 2002
• A high-sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackages
  Journal of Microelectromechanical Systems, 2001
• A high-speed capacitive humidity sensor with on-chip thermal reset
  IEEE Transactions on Electron Devices, 2000
• Environmental sensors based on micromachined cantilevers with integrated read-out
  Ultramicroscopy, 2000
• Design studies on piezoresistive humidity sensors
  Sensors and Actuators B: Chemical, 1998
• Thermoelement humidity sensor
  Sensors and Actuators A: Physical, 1998
• A digital hygrometer using a polyimide film relative humidity sensor
  IEEE Transactions on Instrumentation and Measurement, 1996
• Multi-purpose interface for sensor systems fabricated by CMOS technology with post-processing
  Sensors and Actuators A: Physical, 1993
• High sensitivity CMOS humidity sensors with on-chip absolute capacitance measurement system
  Sensors and Actuators B: Chemical, 1993