Damage and reordering of ion-implanted layers of InP
- 1 March 1981
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 38 (5) , 375-377
- https://doi.org/10.1063/1.92343
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- Stopping cross sections and backscattering factors for 4He ions in matter Z = 1–92, E(4He) = 400–4000 keVAtomic Data and Nuclear Data Tables, 1974