Metalorganic Chemical Vapor Deposition by Pulsed Liquid Injection Using an Ultrasonic Nozzle: Titanium Dioxide on Sapphire from Titanium(IV) Isopropoxide
- 1 October 1995
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 78 (10) , 2763-2768
- https://doi.org/10.1111/j.1151-2916.1995.tb08052.x
Abstract
No abstract availableKeywords
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