Transformation of silicon nitride in oxygen plasma
- 1 May 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 45 (1-3) , 147-154
- https://doi.org/10.1016/0257-8972(91)90217-k
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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