Photoinjection into SiO2: Use of Optical Interference to Determine Electron and Hole Contributions
- 1 December 1969
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 40 (13) , 5093-5101
- https://doi.org/10.1063/1.1657358
Abstract
There is some ambiguity in the interpretation of internal photoemission experiments because of the possible contribution of hole emission from the anode in addition to the cathode electron emission. Furthermore, correction of the photocurrent spectra for optical intensity variations is essential to determination of photoelectric yields. Optical interference is useful as a tool in ascertaining current contributions from the two electrodes since wavelengths of intensity maxima at one electrode correspond approximately to minima at the other. In this work an analysis technique is presented whereby the absorbed intensities are accurately calculated, the absolute quantum yields are determined assuming no hole photocurrent contribution, and the resulting spectra are examined for evidence of such currents. Internal photoemission measurements have been made on Au–SiO2–Si structures, and the technique has been applied to obtain quantum yields and look for evidence of hole emission. It is shown that hole photocurrents (if present) are negligible compared to electron currents and in particular for photoemission from Si into SiO2 the quantum yield for holes must be at least two orders‐of‐magnitude smaller than the electron quantum yield. The first determination of absolute quantum yields for Si–SiO2 and Au–SiO2 emission is presented, and the barrier energies are found to be 4.30 and 4.15 eV respectively. The optical problem has been solved for a range of oxide thicknesses and it is shown that intensity variations are not negligible even for very thin (∼500 Å) films.This publication has 17 references indexed in Scilit:
- EFFECT OF HEATING UNDER BIAS ON PHOTOELECTRIC THRESHOLD IN MOS STRUCTUREApplied Physics Letters, 1968
- Photoemission of Electrons from-Type Degenerate Silicon into Silicon DioxidePhysical Review B, 1966
- Photoemission of Holes from Silicon into Silicon DioxidePhysical Review B, 1966
- Barrier energies in metal-silicon dioxide-silicon structuresJournal of Physics and Chemistry of Solids, 1966
- Photoemission of Electrons from Metals into Silicon DioxideJournal of Applied Physics, 1966
- Photoemission of Electrons from Silicon and Gold into Silicon DioxidePhysical Review B, 1966
- Photoemission of Electrons from Silicon into Silicon Dioxide. Effects of Ion Migration in the OxideJournal of Applied Physics, 1966
- Photoemission of Electrons from Silicon into Silicon DioxidePhysical Review B, 1965
- Photocurrents Through Thin Films of Al2O3Journal of Applied Physics, 1965
- Effect of Ultraviolet Irradiation on the Growth of Anodic Ta[sub 2]O[sub 5] FilmsJournal of the Electrochemical Society, 1957