Effectiveness of Thin Film Encapsulants for Reducing Evaporation during Rapid Thermal Processing of GaAs
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Diffusion of gallium through a silicon dioxide layerJournal of Physics and Chemistry of Solids, 1964