Improved geometry of double-sided polished parallel wafers prepared for direct wafer bonding
- 1 December 1994
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 33 (34) , 7945-7954
- https://doi.org/10.1364/ao.33.007945
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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