Large grained polycrystalline silicon films by solid phase crystallization of phosphorus-doped amorphous silicon
- 1 June 1997
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 177 (3-4) , 191-195
- https://doi.org/10.1016/s0022-0248(96)01117-7
Abstract
No abstract availableKeywords
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