Thermo-pneumatically actuated, membrane-based micro-mirror devices
- 12 October 2006
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 16 (12) , 2524-2531
- https://doi.org/10.1088/0960-1317/16/12/002
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Tunable, membrane-based, pneumatic micro-mirrorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2006
- Tunable, membrane-based, pneumatic micro-mirrorsJournal of Optics A: Pure and Applied Optics, 2006
- Simple models for piston-type micromirror behaviorJournal of Micromechanics and Microengineering, 2006
- Tunable microfluidic microlensesApplied Optics, 2005
- A design methodology for a bulk-micromachined two-dimensional electrostatic torsion micromirrorJournal of Microelectromechanical Systems, 2003
- Endoscopic optical coherence tomography with new MEMS mirrorElectronics Letters, 2003
- Beam-steering micromirrors for large optical cross-connectsJournal of Lightwave Technology, 2003
- Micromachined electromagnetic scanning mirrorsOptical Engineering, 1997