Characterisation of ion-implanted pn-junction diodes in β-SiC films grown on (100) silicon substrates by reactive magnetron sputtering
- 15 April 1992
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 1 (5-6) , 486-488
- https://doi.org/10.1016/0925-9635(92)90149-i
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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