Effects of NH3 nitridation on oxides grown in pure N2O ambient

18 April 1994

journal article
research article
Published by AIP Publishing in Applied Physics Letters

Vol. 64 (16) , 2116-2118
https://doi.org/10.1063/1.111701

Abstract

Effects of NH₃ nitridation on the chemical and electrical properties of N₂O oxides have been studied. Compared with NH₃‐nitrided SiO₂, NH₃ nitridation does not degrade the electrical properties of N₂O oxides, thus resulting in superior impurity diffusion barrier properties, while preserving excellent interface immunity to hot‐carrier injection and much lower charge trapping. Correlation studies between the chemical and electrical properties of NH₃‐nitrided N₂O and NH₃‐nitrided SiO₂ have been done to explain these results.

Keywords

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