Amplitude-modulated electro-mechanical feedback system for silicon condenser microphones
- 1 September 1992
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 2 (3) , 211-214
- https://doi.org/10.1088/0960-1317/2/3/024
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A new condenser microphone in siliconSensors and Actuators A: Physical, 1990
- Development of an electret microphone in siliconSensors and Actuators, 1989
- A subminiature condenser microphone with silicon nitride membrane and silicon back plateThe Journal of the Acoustical Society of America, 1989