Thermodynamic and kinetic considerations on the equilibrium shape for thermally induced microdefects in Czochralski silicon
- 1 May 1986
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 59 (9) , 3255-3266
- https://doi.org/10.1063/1.336908
Abstract
Using thermodynamic and kinetic considerations, we explain the quasiequilibrium, morphological, and structural characteristics of thermally induced oxide precipitates in Czochralski silicon. A model based upon the formation of Frenkel defects at the silicon/silica interface is used to explain the experimentally observed precipitate shapes: 〈110〉 coesite rods, (100) vitreous silica discs, and silica polyhedra at low, intermediate, and high temperatures, respectively.This publication has 31 references indexed in Scilit:
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