A large-force, fully-integrated MEMS magnetic actuator
- 22 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 793-796
- https://doi.org/10.1109/sensor.1997.635219
Abstract
A large-force, fully-integrated, electromagnetic actuator for microrelay applications is presented. Designed for high efficiency, the actuator integrates a cantilever beam and planar electromagnetic coil into a low-reluctance magnetic circuit using a combined surface and bulk micromachining process. Experimental testing shows that a coil current of 80 mA generates a 200 /spl mu/N actuation force. Theoretical extrapolation of the data indicates that an actuation force in the millinewton range can be produced by a coil current of 800 mA. The tested actuators have a footprint of less than 8 mm/sup 2/ and their fabrication is potentially compatible with CMOS processing technology.Keywords
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