Surface analysis of layered thin films using a synchrotron x-ray microbeam combined with a grazing-exit condition

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Abstract
A new surface characterization technique with a lateral spatial resolution has been developed for nondestructive surface analysis using a synchrotron x‐ray microbeam. The grazing‐exit condition for fluorescent x‐ray detection is utilized to attain the surface sensitivity. A focused x‐ray microbeam of high photon flux has realized a lateral spatial resolution of a few μm. A layered thin‐film electrode is analyzed in both the scanning and point modes. In the point mode, the analyzing position is fixed while the exit angle is changed. The characterization of thin films over a small region is made. In the scanning mode, the exit angle is fixed while the sample is being scanned. The two‐dimensional intensity distribution reflects depth information in addition to the lateral elemental distribution. The intensity modulation near to the surface step of the pattern edge is discussed.