Tunable barium strontium titanate thin film capacitors for RF and microwave applications
- 7 August 2002
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Microwave and Wireless Components Letters
- Vol. 12 (1) , 3-5
- https://doi.org/10.1109/7260.975716
Abstract
The measurement results for thin film barium strontium titanate (BST) based voltage tunable capacitors intended for RF applications are reported. At 9 V DC, BST capacitors fabricated using MOCVD (metalorganic chemical vapor deposition) method achieved 71% (3.4:1) tunability. The measured device quality factor (Q) for BST varactors is comparable with the device Q for commercially available varactor diodes of similar capacitance. The typical dielectric loss tangent was in the range 0.003-0.009 at VHF. Large signal measurement and modeling results for BST thin film capacitors are also presented.Keywords
This publication has 10 references indexed in Scilit:
- BaSrTiO/sub 3/ thin films for integrated high frequency capacitorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Low voltage tunable barium strontium titanate thin film capacitors for RF and microwave applicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Structure/property relationships in ferroelectric thin films for frequency agile microwave electronicsIntegrated Ferroelectrics, 1998
- The Effect of (Ba,Sr) and (Mn,Fe,W) Dopants on the Microwave Properties of BaxSr1−xTiO3 Thin FilmsMRS Proceedings, 1998
- The dielectric response as a function of temperature and film thickness of fiber-textured (Ba,Sr)TiO3 thin films grown by chemical vapor depositionJournal of Applied Physics, 1997
- Thin films of novel ferroelectric compositesIntegrated Ferroelectrics, 1996
- HTS/ferroelectric thin films for tunable microwave componentsIEEE Transactions on Applied Superconductivity, 1995
- Fabrication and characterization of Ba1−xSr1−xTiO3 tunable thin film capacitorsThin Solid Films, 1995
- Dielectric Behavior of CVD (Ba,Sr)TiO3 thin Films on Pt/SiMRS Proceedings, 1995
- Voltage tunable capacitors using high temperature superconductors and ferroelectricsIEEE Transactions on Applied Superconductivity, 1994