Optimum design considerations for silicon piezoresistive pressure sensors
- 1 July 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 62 (1-3) , 539-542
- https://doi.org/10.1016/s0924-4247(97)01545-8
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- A graphical representation of the piezoresistance coefficients in siliconIEEE Transactions on Electron Devices, 1982