Sensors in industrial metrology
- 1 September 1987
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 20 (9) , 1113-1126
- https://doi.org/10.1088/0022-3735/20/9/007
Abstract
No abstract availableKeywords
This publication has 20 references indexed in Scilit:
- NanotechnologyJournal of Physics E: Scientific Instruments, 1987
- Solid-state image sensorsSensors and Actuators, 1986
- Imaging with laser scannersOptics News, 1986
- Optical instrumentation for quality assuranceJournal of Physics E: Scientific Instruments, 1986
- A capacitance based ultra-precision spindle error analyserPrecision Engineering, 1985
- Lasers from the standards laboratory to the factory floorJournal of Physics E: Scientific Instruments, 1985
- Force and weight measurementJournal of Physics E: Scientific Instruments, 1982
- Surface Studies by Scanning Tunneling MicroscopyPhysical Review Letters, 1982
- Tool wear sensorsWear, 1980
- Survey of displacement transducers below 50 mmJournal of Physics E: Scientific Instruments, 1979