Rapid Annealing of Silicon
- 1 January 1983
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Annealing of Antimony Implanted Silicon with Halogen Lamp IrradiationPhysica Status Solidi (a), 1982
- Annealing and Residual DamagePublished by Springer Nature ,1982
- Shallow junctions by high-dose As implants in Si: experiments and modelingJournal of Applied Physics, 1980
- Experimental Analysis of Concentration Profiles of Boron Implanted in SiliconPublished by Springer Nature ,1973