Monolithic integration of optical waveguide circuitry with III-V photodetectors for advanced lightwave receivers
- 1 January 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Lightwave Technology
- Vol. 11 (8) , 1296-1313
- https://doi.org/10.1109/50.254088
Abstract
Recent progress in monolithic waveguide-photodetector integration on III-V semiconductors for applications in the 0.8-1.6- mu m wavelength range is reviewed. Critical issues for device performance and fabrication are discussed, followed by a description of the underlying optical coupling mechanisms. Tradeoffs between performance and integrability are assessed in detail for vertical and butt coupling and their variants. It is shown how appropriately chosen integration techniques have led to a variety of monolithic devices for advanced lightwave receivers.Keywords
This publication has 100 references indexed in Scilit:
- Observation of photodetector nonlinearitiesElectronics Letters, 1992
- 1.5 μm InGaAsP/InP vertically coupled semiconductor optical pre-amplifierApplied Physics Letters, 1991
- InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communicationsIEEE Journal of Quantum Electronics, 1991
- Semiconductor photonic integrated circuitsIEEE Journal of Quantum Electronics, 1991
- Resonant cavity-enhanced (RCE) photodetectorsIEEE Journal of Quantum Electronics, 1991
- Effects of absorbing layers on the propagation constants: A four layer model on desktop-computer applied to photodetectors monolithically integrated with optical waveguidesOptics Communications, 1988
- Tunable superlattice p-i-n photodetectors: characteristics, theory, and applicationIEEE Journal of Quantum Electronics, 1988
- Measurement and analysis of periodic coupling in silicon-clad planar waveguidesIEEE Journal of Quantum Electronics, 1982
- Monolithic integrated InxGa1−xAs Schottky-barrier waveguide photodetectorApplied Physics Letters, 1974
- Proton-implanted optical waveguide detectors in GaAsApplied Physics Letters, 1973