Vacuum arc deposition of multilayer X-ray mirrors

This publication has 12 references indexed in Scilit:

• Macroparticle-free thin films produced by an efficient vacuum arc deposition technique
  Journal of Applied Physics, 1993
• Preparation of monolayers of Re and Pt on metal substrates using a pulsed metal plasma deposition source
  Applied Surface Science, 1992
• T-DYN Monte Carlo simulations applied to ion assisted thin film processes
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
• Vacuum arc ion charge-state distributions
  IEEE Transactions on Plasma Science, 1991
• Characterization of a 1 kA vacuum arc plasma gun for use as a metal vapour deposition source
  Surface and Coatings Technology, 1990
• Coating technology based on the vacuum arc-a review
  IEEE Transactions on Plasma Science, 1990
• Thin Film Synthesis Using Miniature Pulsed Metal Vapor Vacuum arc Plasma Guns
  MRS Proceedings, 1990
• Cathodic arc plasma deposition technology
  Thin Solid Films, 1988
• Layered synthetic microstructures as Bragg diffractors for X rays and extreme ultraviolet: theory and predicted performance
  Applied Optics, 1981
• Analysis of the Electrode Products Emitted by dc Arcs in a Vacuum Ambient
  Journal of Applied Physics, 1969