In situ resistance measurements of epitaxial cobalt silicide nanowires on Si(110)

Abstract
We have performed in situ resistance measurements for individual epitaxial CoSi2 nanowires (NWs) (approximately 60 nm wide and 5μm long) formed on a Si(110) surface. Two- and four-point probe measurements were done with a multitip scanning tunneling microscope at room temperature. The NWs were well isolated from the substrate by a Schottky barrier with zero-bias resistance of 107Ω. The resistivity of the NWs was 30μΩcm, which is similar to that for high-quality epitaxial films. The NW resistance was essentially unchanged after exposure to air.