Low Power Micro Gas Sensor
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 827-830
- https://doi.org/10.1109/sensor.1995.717360
Abstract
The stable and low power heating characteristics of a microheater are very important for the micro gas sensor. The membrane type gas sensors were fabricated by silicon IC technology. The steady-state thermal analysis by finite-element method was performed to optimize the thermal properties of gas sensor and to reduce operating power and heat transfer to peripheral IC circuit. The heating characteristics of fabricated poli-Si and Pt heaters were examined.Keywords
This publication has 5 references indexed in Scilit:
- Preparation of polycrystalline SiC films for sensors used at high temperatureSensors and Actuators A: Physical, 1994
- A new SnO2 low temperature deposition technique for integrated gas sensorsSensors and Actuators B: Chemical, 1993
- Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processingIEEE Electron Device Letters, 1993
- A substrate for thin-film gas sensors in microelectronic technologySensors and Actuators B: Chemical, 1990
- Integrated hydrogen leak detector with a tunnel mis structureSensors and Actuators, 1988