Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry
Top Cited Papers
- 30 January 2003
- journal article
- Published by Elsevier in Solar Energy Materials and Solar Cells
- Vol. 78 (1-4) , 143-180
- https://doi.org/10.1016/s0927-0248(02)00436-1
Abstract
No abstract availableKeywords
This publication has 34 references indexed in Scilit:
- Heterogeneity in hydrogenated silicon: Evidence for intermediately ordered chainlike objectsPhysical Review B, 2001
- Effect of Strained Si-Si Bonds in Amorphous Silicon Incubation Layer on Microcrystalline Silicon NucleationMRS Proceedings, 2001
- Intrinsic microcrystalline silicon: A new material for photovoltaicsSolar Energy Materials and Solar Cells, 2000
- Deposition mechanism of hydrogenated amorphous siliconJournal of Applied Physics, 2000
- Surface roughness evolution of a-Si:H growth and its relation to the growth mechanismMRS Proceedings, 2000
- Study of the Amorphous-to-Microcrystalline Transition during Silicon Film Growth at Increased Rates: Extensions of the Evolutionary Phase DiagramMRS Proceedings, 2000
- Effects of Structural Properties of νc-Si:H Absorber Layers on Solar Cell PerformanceMRS Proceedings, 2000
- Interface-layer formation mechanism inthin-film growth studied by real-time spectroscopic ellipsometry and infrared spectroscopyPhysical Review B, 1999
- Kinetics of Surface Growth: Phenomenology, Scaling, and Mechanisms of Smoothening and RougheningAnnual Review of Physical Chemistry, 1994
- Defect formation during growth of hydrogenated amorphous siliconPhysical Review B, 1993