Defect ordering in epitaxial α-GaN(0001)

Abstract
The microstructure of nominally undoped epitaxial wurtzite‐structure α‐GaN films, grown by gas‐source molecular‐beam epitaxy, plasma‐assisted molecular‐beam epitaxy, and metalorganic chemical‐vapor deposition, has been investigated by transmission electron microscopy (TEM) and high‐resolution TEM. The results show that undoped α‐GaN films have an ordered point‐defect structure. A model of this defect‐ordered microstructure, based upon a comparison between experimental results and computer simulations, is proposed.