Diffusion of Phosphorus into Silicon
- 1 October 1962
- journal article
- Published by Physical Society of Japan in Journal of the Physics Society Japan
- Vol. 17 (10) , 1592-1597
- https://doi.org/10.1143/jpsj.17.1592
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- The Diffusion of Phosphorus in SiliconJournal of the Electrochemical Society, 1962
- Field-Enhanced Donor Diffusion in Degenerate Semiconductor LayersJournal of Applied Physics, 1961
- Detailed analysis of thin phosphorus-diffused layers in p-type siliconSolid-State Electronics, 1961
- Evaluation of the Surface Concentration of Diffused Layers in SiliconBell System Technical Journal, 1958
- Diffusion of Donor and Acceptor Elements in SiliconJournal of Applied Physics, 1956