A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer
- 25 November 2004
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (2) , 336-345
- https://doi.org/10.1088/0960-1317/15/2/013
Abstract
No abstract availableKeywords
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