Quasi-monolithic planar load cells using built-in resonant strain gauges
- 1 December 1993
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 3 (4) , 193-197
- https://doi.org/10.1088/0960-1317/3/4/006
Abstract
Two load cell designs are presented using resonant strain gauges providing a frequency output. One design is based on a four-point beam deflection jig. It offers high sensitivity, but suffers from robustness and impractical geometries for a broad force range. A modified planar design (typical dimensions 1-10 mm) removes these drawbacks and in addition features built-in force reduction, overhead protection and compensation of common mode effects. Load ranges vary from high (1 500 N) to very low (0.03 N), with theoretically achievable resolutions as high a 1 part in 107.Keywords
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