Diffraction grating transmission efficiencies for XUV and soft x rays

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Abstract
Efficiencies for diffraction of 45–275-eV x rays into orders by interferometrically formed, electrodeposited, gold transmission gratings have been measured on the 4° beam line at the Stanford Synchrotron Radiation Project (SSRP). Anomalous dispersion affects the observed efficiency since the gold is partially transmitting to x rays. Model calculations which include anomalous dispersion are in good agreement with observations. With a suitable choice of material and thickness, a grating can be optimized for a given wavelength range by reducing the zero order transmission and enhancing the higher orders. Even orders are suppressed for a grating with equal slit and wire sizes.