Sputter-etching and plasma effects on the electrical properties of titanium nitride contacts on n-type silicon
- 30 November 1990
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 33 (11) , 1387-1391
- https://doi.org/10.1016/0038-1101(90)90113-s
Abstract
No abstract availableKeywords
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