Detection of Al and Mg contamination in sputtered Pt films by Auger electron spectroscopy and secondary ion mass spectrometry
- 1 September 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 37 (3) , 357-372
- https://doi.org/10.1016/0040-6090(76)90606-4
Abstract
No abstract availableKeywords
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