Photon and ion beam assisted deposition of titanium nitride
- 1 August 1996
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 99 (4) , 313-318
- https://doi.org/10.1016/0169-4332(96)00102-x
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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