Numerical solution of the nonlinear diffusion equation for the anomalous boron diffusion in silicon
- 16 July 1985
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 90 (1) , 173-180
- https://doi.org/10.1002/pssa.2210900116
Abstract
No abstract availableKeywords
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