Substrates: The material bases of microelectronics and nanoelectronics
- 31 December 1993
- journal article
- review article
- Published by Elsevier in Progress in Quantum Electronics
- Vol. 17 (4) , 273-298
- https://doi.org/10.1016/0079-6727(93)90003-r
Abstract
No abstract availableKeywords
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