The role of the MOS structure in integrated sensors

This publication has 39 references indexed in Scilit:

• Three-dimensional representation of input and output transducers
  Sensors and Actuators, 1982
• Integrated silicon microbeam PI-FET accelerometer
  IEEE Transactions on Electron Devices, 1982
• An MOS device for AC measurement of surface impedance with application to moisture monitoring
  IEEE Transactions on Electron Devices, 1982
• Micromechanical accelerometer integrated with MOS detection circuitry
  IEEE Transactions on Electron Devices, 1982
• The charge-flow transistor: A new MOS device
  Applied Physics Letters, 1977
• Piezoelectric DMOS strain transducers
  Applied Physics Letters, 1976
• A hydrogen−sensitive MOS field−effect transistor
  Applied Physics Letters, 1975
• Charge Coupled Semiconductor Devices
  Bell System Technical Journal, 1970
• Development of an Ion-Sensitive Solid-State Device for Neurophysiological Measurements
  IEEE Transactions on Biomedical Engineering, 1970
• TRANSDUCER ACTION IN A METAL-INSULATOR-PIEZOELECTRIC-SEMICONDUCTOR TRIODE
  Applied Physics Letters, 1965