Formation of two-dimensional electron gases in polytypic SiC heterostructures
- 15 July 2005
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 98 (2)
- https://doi.org/10.1063/1.1984070
Abstract
The formation of two-dimensional electron gases (2DEGs) at polytypic (hexagonal/cubic) SiC heterojunctions (4H/3C SiC and 6H/3C SiC) is investigated by numerical self-consistent solutions of the Schrödinger and Poisson equations. The free-electron-density distributions and conduction-band profiles in the SiC heterostructures are calculated and compared to those occurring at AlGaN/GaN interfaces. Spontaneous and piezoelectric polarization effects in both SiC/SiC and AlGaN/GaN structures are taken into account. The combined effect of the polarization-induced bound charge and conduction-band offset between the hexagonal and cubic SiC polytypes results in the formation of 2DEGs with very high electron sheet concentration. 2DEG sheet densities about 20% larger than that in Al0.3Ga0.7N/GaN structures are calculated for 4H/3C SiC heterostructures. We also find that the 2DEG densities in the 4H/3C are much less sensitive to variations of the barrier layer thickness. The influence of the barrier doping layer on the 2DEG densities is also investigated.This publication has 28 references indexed in Scilit:
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