Target and substrate surface reaction kinetics in magnetron sputtering of nitride coatings
- 1 October 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 191 (2) , 335-348
- https://doi.org/10.1016/0040-6090(90)90384-p
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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