Composition and properties of transition metal nitride thin films (ZrN , NbN , MoN )
- 1 December 1988
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 36 (3-4) , 715-727
- https://doi.org/10.1016/0257-8972(88)90012-6
Abstract
No abstract availableKeywords
This publication has 23 references indexed in Scilit:
- Young's modulus of TiN, TiC, ZrN and HfNThin Solid Films, 1987
- Reactively sputtered nitrides and carbides of titanium, zirconium, and hafniumJournal of Vacuum Science & Technology A, 1986
- Characterization of hard nitride and carbide titanium and zirconium coatings on high‐speed steel cutting tool insertsJournal of Vacuum Science & Technology A, 1986
- Room temperature deposition of superconducting NbN for superconductor–insulator–superconductor junctionsJournal of Vacuum Science & Technology A, 1986
- Properties of NbN thin films deposited on ambient temperature substratesJournal of Applied Physics, 1983
- Abrasion resistance, microhardness and microstructures of single-phase niobium nitride filmsThin Solid Films, 1983
- Very high rate reactive sputtering of TiN, ZrN and HfNThin Solid Films, 1983
- ZrN diffusion barrier in aluminum metallization schemesThin Solid Films, 1983
- rf reactively sputtered superconducting NbNx filmsJournal of Applied Physics, 1974
- Propriétés et structure des couches minces de nitrure de niobium élaborées par pulvérisation cathodique réactive I. Élaboration et propriétésJournal of the Less Common Metals, 1974