Abrasion resistance, microhardness and microstructures of single-phase niobium nitride films
- 1 September 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 107 (2) , 207-215
- https://doi.org/10.1016/0040-6090(83)90023-8
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- A study of heterogeneous niobium carbonitride thin films deposited by reactive sputteringThin Solid Films, 1982
- Tribological and protective coatings by chemical vapour depositionThin Solid Films, 1981
- Materials and device aspects of some high Tc superconducting filmsJournal of Vacuum Science and Technology, 1981
- Structural characterization of NbCN thin filmsJournal of Vacuum Science and Technology, 1981
- Surface Hardness and Abrasive Wear Resistance of Ion-Implanted SteelsA S L E Transactions, 1981
- Effects of deposition parameters on the properties of superconducting rf reactively sputtered NbN filmsJournal of Vacuum Science and Technology, 1980
- TiN and TiC coating on cemented carbides by ion platingThin Solid Films, 1978
- The preparation of hard coatingsThin Solid Films, 1977
- Superconducting Properties and Structure of Reactively Sputtered Niobium Carbide Thin FilmsJournal of Vacuum Science and Technology, 1973
- Superconducting Properties of Niobium Carbonitride Thin FilmsApplied Physics Letters, 1971