Deactivation of electrically active arsenic in silicon during cooling-down from elevated temperatures
- 15 May 1992
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 71 (10) , 4854-4858
- https://doi.org/10.1063/1.350629
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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