Micromachined DC contact capacitive switch on low-resistivity silicon substrate
- 1 February 2006
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 127 (1) , 24-30
- https://doi.org/10.1016/j.sna.2005.11.011
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Improvement of isolation for MEMS capacitive switch via membrane planarizationSensors and Actuators A: Physical, 2004
- RF-power: driver for electrostatic RF-MEMS devicesJournal of Micromechanics and Microengineering, 2004
- High-isolation inductively-tuned X-band MEMS shunt switchesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Monolithically integrated micromachined RF MEMS capacitive switchesSensors and Actuators A: Physical, 2001
- RF MEMS from a device perspectiveJournal of Micromechanics and Microengineering, 2000
- Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substratesIEEE Transactions on Microwave Theory and Techniques, 1997