Solid state nucleation in the Ti-Si ultrathin film system
- 1 January 1983
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 12 (1) , 1-10
- https://doi.org/10.1007/bf02651631
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Silicide surface phases on goldJournal of Applied Physics, 1981
- The structure of gold silicide in thin Au/Si filmsThin Solid Films, 1980
- Thin film interaction between titanium and polycrystalline siliconJournal of Applied Physics, 1980
- Backscattering analysis of the successive layer structures of titanium silicidesThin Solid Films, 1979
- First phase nucleation in silicon–transition-metal planar interfacesApplied Physics Letters, 1976
- Solid state reactions in titanium thin films on siliconThin Solid Films, 1976