Recoil implantation from a thin source: II. Extension to the problems of recoil sputtering and of moderately thick sources
- 31 October 1978
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 76-77, 175-182
- https://doi.org/10.1016/0022-3115(78)90132-0
Abstract
No abstract availableKeywords
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