Crystalline Orientation Control for Bi-Sr-Ca-Cu-O Thin Films Prepared on (110)SrTiO3 by Coevaporation
- 1 June 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (6A) , L1006
- https://doi.org/10.1143/jjap.30.l1006
Abstract
Superconducting Bi-Sr-Ca-Cu-O thin films were prepared on (110)SrTiO3 substrates by coevaporation with an rf oxygen plasma. Four orientation categories were observed, the 2223-phase (119) orientation, the 2212-phase (119) orientation, the 2212-phase (117) orientation, and the 2212-phase (00n) orientation. It has been confirmed that these orientations can be controlled by changing the rf oxygen plasma conditions. The (00n) orientation grew as the oxygen flow rate increased or as the rf power increased.Keywords
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