Phase Control of Bi-Sr-Ca-Cu-O Thin Films Prepared by Coevaporation with RF Oxygen Plasma

1 November 1990

journal article
Published by IOP Publishing in Japanese Journal of Applied Physics

Vol. 29 (11A) , L2045
https://doi.org/10.1143/jjap.29.l2045

Abstract

Thin films of Bi-Sr-Ca-Cu-O were prepared on (100)SrTiO₃ substrates by coevaporation with rf oxygen plasma. It has been confirmed that the structural phases of films can be controlled mainly by the flux density of activated oxygen and the substrate temperature, and not by the chemical compositions of the films. Thin films in the Bi₂(Sr, Ca)₃Cu₂O_y phase and the Bi₂(Sr, Ca)₂CuO_y phase were prepared by changing the flux density of activated oxygen and the substrate temperature. The films in the Bi₂(Sr, Ca)₃Cu₂O_y phase showed superconducting transitions at 35 K.

Keywords

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