Boron compounds as a dominant source of alpha particles in semiconductor devices
- 1 January 1995
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 32, 297-302
- https://doi.org/10.1109/relphy.1995.513695
Abstract
The interaction of cosmic ray neutrons and boron is demonstrated as the dominant source of alpha particles and other radiations in electronic devices utilizing borophosphosilicate glass (BPSG). A simple process modification is proposed to significantly reduce this intense source of ionizing radiation without compromising the reflow and passivation properties of BPSG.Keywords
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