Energy and angular distributions of atoms sputtered from polycrystalline surfaces: Thompson and beyond
- 1 April 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 40-41, 313-316
- https://doi.org/10.1016/0168-583x(89)90987-7
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
- Energy and angle-resolved studies of neutrals desorbed from ion bombarded polycrystalline metal surfacesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Energy- and angle-resolved detection of neutral atoms desorbed from ion bombarded single crystals. Rh{111} and p(2 × 2)O/Rh{111}Surface Science, 1986
- Detector for measuring energy- and angle-resolved neutral-particle (EARN) distributions for material desorbed from bombarded surfacesReview of Scientific Instruments, 1986
- Angular distributions of sputtered particlesJournal of Vacuum Science & Technology A, 1986
- The angular distribution of sputtered silver atomsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Angular distribution of particles sputtered from Cu, Pt and Ge targets by keV Ar+ ion bombardmentNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Sputtering of the gallium-indium eutectic alloy in the liquid phaseSurface Science, 1983
- Sputtering of multicomponent materials: Elements of a theoryNuclear Instruments and Methods in Physics Research, 1982
- Theory of sputtering and comparison to experimental dataNuclear Instruments and Methods in Physics Research, 1982
- II. The energy spectrum of ejected atoms during the high energy sputtering of goldPhilosophical Magazine, 1968