A thermodynamic factor influencing the growth rate and purity of epitaxial layers in the Ga-AsCl3-H2 system
- 1 December 1978
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 45, 164-170
- https://doi.org/10.1016/0022-0248(78)90429-3
Abstract
No abstract availableKeywords
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