Characterization of ALCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy
- 5 February 2002
- journal article
- Published by Elsevier
- Vol. 303 (1) , 83-87
- https://doi.org/10.1016/s0022-3093(02)00970-5
Abstract
No abstract availableKeywords
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